Substrate transfer device
We provide the optimal "conveying" technology considering accuracy requirements, space, and productivity.
1. Conveying with a conveyor - Achieves the transport of thin films of 0.12mm and large glass of 2,200mm × 2,500mm - Equipped with a high-precision alignment function using a CCD camera, compatible with rotation mechanisms at arbitrary angles 2. Conveying with a stage - Offers a flat stage with a flatness of 20μm and a pin stage effective for static electricity countermeasures - Supports high-precision transport with pitching accuracy of ±0.05° and yawing accuracy of ±0.02° 3. Conveying with SCARA - Capable of designing and manufacturing SCARA transport tailored to limited installation ranges and payloads - Also manufactures transport systems compatible with higher-level communication systems equipped with standard SCARA 4. R2R (Roll to Roll) transport - Continuous feeding and pitch feeding control system for film rolls
- Company：プレマテック
- Price：Other
